Drying Systems

The IPA dryer, manufactured by atp, enables a high quality standard in the drying of wafers withregard to surface quality and low particle count. Used as a stand-alone unit, wafers up to a size of 8" can be dried.As part of the refurbishment activities at atp, so-called legacy tools, in particular SAT and SST systems, are being rebuilt and equipped with newly adapted control and visualization systems. SAT tools are combined spray systems for etching and cleaning tasks and are used for the removal of oxide layers, stripping of photoresist and multi-stage surface cleaning processes (RCA cleaning).